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Publicationer information ikon

Fabrication of SOI micromechanical devices: Dissertation

Öppen tillgång
Kiihamäki, Jyrki
VTT Publications2005Publicationer information ikon

14 MHz micromechanical oscillator

Referentgranskad
DOI
10.1016/S0924-4247(01)00813-5
Mattila, Tomi; Jaakkola, Olli; Kiihamäki, Jyrki; Karttunen, Jani; Lamminmäki, Tuomas; Rantakari, P.;...
Sensors and Actuators A: Physical2002Publicationer information ikon

14 MHz Micromechanical Oscillator

Referentgranskad
Mattila, T.; Jaakkola, O.; Kiihamäki, Jyrki; Karttunen, J.; Lamminmäki, T.; Rantakari, P.; Oja, A.; ...
-2001Publicationer information ikon

Lattice impurity-related stress in micromechanical silicon devices

Sievilä, Päivi; Tittonen, Ilkka
-2013Publicationer information ikon

Micromechanical mirror for Fourier transform interferometry

Antila, Jarkko; Oja, Aarne; Saari, Heikki
Helsinki University of Technology Publications in Engineering Physics A2003Publicationer information ikon

Silicon Micromechanical Resonators for RF- Applications

Referentgranskad
Mattila, Tomi; Kaajakari, Ville; Kiihamäki, Jyrki; Oja, Aarne; Kattelus, Hannu; Seppä, Heikki; Koske...
Physica Scripta2004Publicationer information ikon

A 12 MHz micromechanical bulk acoustic mode oscillator

Referentgranskad
DOI
10.1016/S0924-4247(02)00204-2
Mattila, Tomi; Kiihamäki, Jyrki; Lamminmäki, Tuomas; Jaakkola, Olli; Rantakari, Pekka; Oja, Aarne; S...
Sensors and Actuators A: Physical2002Publicationer information ikon

Micromechanical modelling of functionally graded materials

Referentgranskad
Gasik, M.
Computational Materials Science1998Publicationer information ikon

Scanning micromechanical mirror for fine-pointing units of intersatellite optical links

Referentgranskad
DOI
10.1088/0964-1726/10/6/309
Suhonen, Mika; Graeffe, Jussi; Sillanpää, Teuvo; Sipola, Hannu; Eiden, Michael
Smart Materials and Structures2001Publicationer information ikon

Micromechanical analysis of kinematic hardening in natural clay

Referentgranskad
Yin, Zhen-Yu; Chang, Chingshung; Hicher, Pierre-Yves; Karstunen, Minna
International Journal of Plasticity2009

Fabrication of SOI micromechanical devices: Dissertation

Öppen tillgång
2005

14 MHz micromechanical oscillator

Referentgranskad
DOI
10.1016/S0924-4247(01)00813-5
2002

14 MHz Micromechanical Oscillator

Referentgranskad
2001

Lattice impurity-related stress in micromechanical silicon devices

2013

Micromechanical mirror for Fourier transform interferometry

2003

Silicon Micromechanical Resonators for RF- Applications

Referentgranskad
2004

A 12 MHz micromechanical bulk acoustic mode oscillator

Referentgranskad
DOI
10.1016/S0924-4247(02)00204-2
2002

Micromechanical modelling of functionally graded materials

Referentgranskad
1998

Scanning micromechanical mirror for fine-pointing units of intersatellite optical links

Referentgranskad
DOI
10.1088/0964-1726/10/6/309
2001

Micromechanical analysis of kinematic hardening in natural clay

Referentgranskad
2009